Preparation of Probe Tips Applied to Tuning Fork Atomic Force Microscopy
WANG Ya-li1,XIONG Yan-yan2,GAO Si-tian3,ZHOU Yan-jiang1,SHI Yu-shu3
1. College of Mechanical Eng & Autom, Zhejiang Sci-Tech University, Hangzhou, Zhejiang 310027, China
2. School of Instrument Science & Optoelectronic Eng, Beijing Information Sci & Tech University, Beijing 100192, China
3. National Institute of Metrology, Beijing 100029, China
Abstract The system of tungsten probe tips preparation using electrochemical etching method is introduced. It can automatically and quickly control the corrosion on or off through the real-time detection of the electrochemical etching weak current signal and power-off time is 0.3 ms. The system has prepared the desired profile of the exponential probe. Analyzing the relationship between the electrolysis voltage, electrolyte concentration and the corrosion current, the optimum parameters for corrosion will be determined. The quartz tuning fork and homemade tungsten probe bonding constituted an atomic force microscope probe, this will make a force curve test in amplitude modulation mode. The results showed that the homemade tungsten probe can meet the requirements of AFM scanning head. Tuning fork signal is stable to identify changes in the movement of 10 nm. For the development of high performance tuning fork AFM provides the experimental technology base.
WANG Ya-li,XIONG Yan-yan,GAO Si-tian, et al. Preparation of Probe Tips Applied to Tuning Fork Atomic Force Microscopy[J]. Acta Metrologica Sinica, 2017, 38(1): 43-46.
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2017, Vol. 38 
