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Research on Measurement Standards and Establishment of Traceable Hierarchy of Micro-nano Force Metrology |
Hu Gang |
Mechanics and Acoustics Division, National Institute of Metrology, Beijing 100013 |
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Abstract The research of force metrology in the range from nanonewton to micronewton is an important orientation in international metrological researches at present. Up-to-date research achievements of the force standards, force sensors, reference cantilevers and traceable approaches in the range from nanonewton to micronewton in NIST, NPL, PTB and KRISS are described. A traceable hierarchy of micro-nano scale force metrology is put forward. It guarantees accuracy and consistency of dissemination for micro-nano mechanical properties testing in the field of advanced materials, biotechnology, microelectronics and etc.
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