|
|
Self-calibration System for the Value Drifts of CCD Autocollimator |
ZHANG Jun-jie1,2,WANG Zhen2,LI Zheng-yang2,ZHANG Jun-xiu2 |
1. State Key Lab of Precision Measuring Technology and Instruments, Tianjin University, Tianjin 300072, China
2. Beijing Aerospace Institute for Metrology and Measurement Technology, Beijing 100076, China |
|
|
Abstract When the digital autocollimator is put into use directly, its indications will drift and beat under the influence of environmental conditions such as air streams and the increasing heat of equipment itself, which leads to the measuring errors greatly increased and the measurement results could not return to zero. A fixed mirror which is added as a reference mirror makes the differential measurement with a working mirror and forms a self-calibration system, which could effectively reduce errors. The value of drift is 0.03″ in two hours when working mirror is only used and it reduces to 0.01″ after the adoption of a self-calibration system; the standard deviation of samples is 0.0911″ and it reduces to 0.0574″ after the self-calibration. The self-calibration system of differential mirror could effectively reduce the indication errors of CCD autocollimator and plays an efficient role in reducing the indication beat. It is an effective way for the system to reduce the drift and beat of the equipment caused by both the environmental conditions and the equipment themselves.
|
|
|
|
|
|
[1]王权陡,余景池,张忠玉,等. 相移干涉技术在小角度及直线度测量中的应用[J]. 计量学报,2002, 23(1): 9-12.
[2]Brich K P. The Result of a Comparision Between Calculated and Measured Value of the Refractive Index of Air [J]. J Phys E Sci Instrum, 1988, 21: 121-129.
[3]殷纯永,郭继华,毛文炜. 光学仪器设计中的光学自适应原则[J]. 仪器仪表学报,1995,16(1): 62-66.
[4]Yin C Y, Guo J H. Novel comprehension of “common path” principle [J]. Optics and Laser in Engineering, 2005, 43(10): 1081-1095.
[5]Birch K P. Correction to the Updated Edlen Equation for the Refractive Index of Air [J]. Metrologia, 1994, 31: 315-316.
[6]张逸新,迟泽英. 光波在大气中的传输与成像[M]. 北京:国防工业出版社,1997.
[7]张俊杰,操晶晶,贡力,等. 微型零件图像测量清晰度算法的选择与综合评价[J]. 光学 精密工程,2008, 16(3): 543-550. |
|
|
|