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The Contact Measuring Head of in Dual-probe Atomic Force Microscope |
ZHANG Hua-kun1,2,GAO Si-tian1,LI Wei1 |
1. School of Instr Sci & Opto-electronics Engineering, Hefei University of Technology
2. National Institute of Metrology
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Abstract In order to align two probes of dual-probe atomic force microscope (AFM), it is necessary to establish a measuring head to do in-depth research on the probe A scanning the probe B. Firstly, the mechanical characteristics of the probe are obtained by finite element (FE) simulations. Secondly, using the locked-in amplifier to attain the amplitude and frequency signals to analyze the system resolution (better than 1nm), the probe is rotated 90 degrees compared traditional AFM. Lastly, probe B is scanned by probe A in YOZ plane, reducing the scanning range and scanning step gradually. The alignment accuracy is of 5 nm.
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Received: 24 October 2014
Published: 10 December 2015
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Corresponding Authors:
GAO Si-tian
E-mail: gaost@nim.ac.cn
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