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High Precision Roundness Measurement for Large Cylindrical Shaft Based on Multiple Capacitance Sensors |
KANG Yan-hui1,ZHANG Heng1,LI Ying-zhong2 |
1.National Institute of Metrology, Beijing 100013, China
2.Beijing Dongfang Jingyi Machinery & Equipment Co. Ltd, Beijing 100074, China |
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Abstract In order to realize the high precision roundness on-line measurement for large cylindrical shaft, a non-contact roundness measurement system based on multiple capacitance sensors is developed, which can measure the range of Ф800 mm. The roundness measurement methods for the shaft of large high-precision rotary tables are analyzed, especially the error separation technique by three-point method. The principle and structure of capacitance sensor are discussed, and the system composition and data evaluation methods are presented. Compared with a high precision roundness measurement equipment, the experimental result shows that the indication error is better than 0.1 μm and repeatability is less than 0.05 μm, which can satisfy the field measurement.
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[1]黄富贵, 郑育军. 基于区域搜索的圆度误差评定方法[J]. 计量学报, 2008, 29(2): 117-119.
[2]张玉梅, 左春柽, 刘岩, 等. 圆度误差检测方法现状与展望[J]. 工具技术, 2008, 42(11): 8-11.
[3]Chetwynd D G, Siddall G J. Improving the Accuracy of Roundness Measurement[J]. Journal of Physics E: Scientific Instruments, 1976, 9: 537-544.
[4]Jeong G B, Kim D H, Jang D Y. Real Time Monitoring and Diagnosis System Development in Turning through Measuring a Roundness Error based on Three-point Method[J]. International Journal of Machine Tools & Manufacture, 2005, 45(12-13): 1494-1503.
[5]Muralikrishnan B, Venkatachalam S, Raja J, et al. A Note on the Three-point Method for Roundness Measurement[J]. Precision Engineering, 2005, 29(2): 257-260.
[6]洪迈生, 蔡萍. 多步法误差分离技术的比较分析[J]. 上海交通大学学报, 2004, 38(6): 877-881.
[7]Moore D. Design Considerations in Multiprobe Roundness Measurement[J]. Journal of Physics E: Scientific Instruments, 1989, 22(6): 339-343.
[8]张镭, 赵莹, 张玉. 三测头法误差分离技术的理论与试验[J]. 机械工程学报, 2009, 45(6): 256-261.
[9]张建寰, 高学敏, 杨晓东. 调焦光路中超精密双等位环平板电容位移传感器研究[J]. 计量学报, 2006, 27(Z1): 203-206.
[10]胡敏, 李晓莹, 常洪龙, 等. 基于ASIC芯片的微小电容测量电路研究[J]. 计量学报, 2007, 28(4): 379-382.
[11]国家质量监督检验检疫总局. GB/T 26098—2010, 圆度测量仪[S]. 2011.
[12]张春阳, 雷贤卿, 李济顺, 等. 基于几何优化的圆度误差评定算法[J]. 机械工程学报, 2010, 46(12): 8-12.
[13]徐志玲, 刘宇, 程琦. 4种圆度误差评定方法分析[J]. 计量学报, 2009, 30(Z1): 38-41. |
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