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| Precision Measurement for Feature Length of Cylinder Acoustic Resonator Cavity |
| REN Guo-ying |
| National Institute of Metrology, Beijing 100013,China |
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Abstract Feature length of acoustic resonator cavity is one of the important parameters when measuring Boltzmann constant with acoustic method. Its measurement uncertainty directly affects the uncertainty of Boltzmann constant k. The development of high-precision measurement system for feature length of acoustic resonance cavity is introduced, its key technology described, and the measurement result with a real time correcting about the environmental parameters is achieved. According to the test data, this measurement system can get the uncertainty of measurement of 0.60μm, standard deviation of 0.20μm in 3 times measurement.
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2012, Vol. 33 
