|
|
|
| Comparative Study on the Calibration Methods of the Indenter Area Function of the Instrumented Nanoindentation |
| LI Zheng-wei1,TAO Xing-fu2,SHU Xue-feng1,REN Ling-ling2 |
1.Research Institute of Applied Mechanics and Biomedical Engineering, Taiyuan University of Technology, Taiyuan, Shanxi 030024, China;
2.National Institute of Metrology, Beijing 100029, China |
|
|
|
|
Abstract The indenter area function and the machine compliance of the instrumented nanoindentation are calibrated directly by atomic force microscope and indirectly by indentation of the standard fused silica, respectively. The calibration results of the two methods were applied to the indentations of the standard fused silica and the polycarbonate. The indentation results show, at low indentation depth, the hardness and the reduced modulus measured by the direct calibration method are more accurate than that of calibrated by the indirect method. However, the results of the two methods have small difference at high indentation depth.
|
|
|
|
|
|
［1］张泰华.微/纳米力学测试技术及其应用［Ｍ］. 北京:机械工业出版社,2005.
［2］Herrmann K, Jennett N M, Wegener W. Progress in determination of the area function of indenters used for nanoindentation ［J］. Thin Solid Films,2000,377-378: 394-400.
［3］Jennett N M, Shafirstein G, Saunders S R J. Comparison of indenter tip shape measurement using a calibrated AFM and indentation into fused silica ［C］//Hardness Testing in Theory and Practice VDI Berichte 1194,VDI-Verlag GmbH Dusseldorf,1995:201-210.
［4］邓墨杰,高思田,卢明臻,等.纳米力学测量系统的载荷和位移溯源校准方法研究［J］.计量学报,2012, 33(4): 289-293.
［5］ISO 14577—2002, Metallic material-Instrumented indentation test for hardness and materials parameters［S］.
［6］Oliver W C, Pharr G M. An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments ［J］. Journal of Materials Research,1992,7(6):1564-1583.
［7］Jiao Y, Schaeffer T E.Accurate height and volume measurements on soft samples with the atomic force microscope［J］. Langmuir, 2004,20 (23):10038-10045.
［8］Barone A C, Salerno M, Patra N.Calibration issues for nanoindentation experiments: Direct atomic force microscopy measurements and indirect methods ［J］. Microscopy Research and Technique, 2010, 73(10):996-1004. |
|
|
|
2015, Vol. 36 
