Abstract Based on the laser interferometry, and the high speed linear driving and measurement technique, a dynamic and static measurement system for linear encoders is developed. The general structure of the measurement system is described, and the dynamic and static measurement process is introduced. The critical components are also presented in detail, including the linear driving unit and the clamping and adjusting mechanism for linear encoders. The measurement system can measure the dynamic and static performance of linear encoders in the range of 2 m. The experimental result shows that static indication error is better than 0.3μm/m, and the velocity evaluation is up to 180m/min, which can well satisfy the need of high precision measurement of linear encoders.
2014, Vol. 35 
