基于可溯源光栅的高精度位移测量系统研究及不确定度分析

doi:10.3969/j.issn.1000-1158.2025.02.01

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Abstract By constructing a traceable grating displacement measurement system with the grating pitch calibration value as the value of the pitch， the transfer of the value from the meter definition to the grating displacement measurement system was achieved. The influence of the alignment error between the grating and the read head on the grating pitch and interference signal contrast was analyzed. The static stability experiment of the system and the displacement measurement consistency experiment with the laser interferometer were conducted， and the experimental results showed that： The short-term stability of the traceable grating displacement measurement system was 3.35 nm， and the long-term stability was better than 70 nm； The system and the laser interferometer have good consistency in the measurement results of different stroke displacements， at each measurement point within the 10 μm and 500 μm displacement ranges， the absolute values of the measurement average errors do not exceed 0.07% and 0.013% respectively. Finally， the main sources of system measurement uncertainties were analyzed， and the system uncertainty for 10 μm displacement measurements was evaluated， the relative expanded uncertainty result was 0.83% （k = 2）.

Key words： geometric measurement traceable grating grating displacement measurement system alignment error laser interferometer uncertainty

Received: 27 March 2024 Published: 04 March 2025

PACS:

TB921

Corresponding Authors: SHI Yu-shu E-mail: shiys@nim.ac.cn

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	GAO Qiyuan
	SHI Yushu
	ZHANG Shu
	SHI Zhoumiao
	WANG Kang
	HU Jiacheng

Cite this article:

GAO Qiyuan,SHI Yushu,ZHANG Shu, et al. Traceable-Grating-Based High Precision Displacement Measurement System and Its Uncertainty Analysis[J]. Acta Metrologica Sinica, 2025, 46(2): 151-159.

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http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2025.02.01 OR http://jlxb.china-csm.org:81/Jwk_jlxb/EN/Y2025/V46/I2/151

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