基于单传感器的晶圆校准器旋转轴回转误差补偿研究

doi:10.3969/j.issn.1000-1158.2024.12.03

Abstract
Figure/Table
References (17)
Related Citation (15)

Download: PDF (800 KB) HTML (1 KB)
Export: BibTeX | EndNote (RIS)

Abstract Compensation for rotational axis error in semiconductor wafer calibrators is crucial for enhancing positioning accuracy.This study presents a compensation method based on a single sensor for the rotational axis error of wafer calibrators.This approach effectively avoids introducing new errors and multiple calibration issues associated with using additional sensors or equipment.The method employs a dual filtering technique that combines ensemble averaging with wavelet threshold denoising to reduce random noise in the collected signals.Additionally, a statistical error separation method is utilized to accurately isolate roundness errors embedded in high signal-to-noise ratio measurements.By employing a multi-step approach, the method calculates precise rotational errors and utilizes the derived error data to correct the circumferential data of the wafer detected by the sensor, thus achieving compensation.Experimental results indicate that the calibration deviation in the positioning of the wafer calibrator is approximately 0.02 mm, demonstrating an improvement in calibration accuracy and validating the effectiveness of the proposed method.

Key words： geometric measurement;wafer calibrator error compensation rotation error mathematical statistics;ensemble averaging;wavelet threshold denoising

Received: 13 May 2024 Published: 18 December 2024

PACS:

TB92

	Service

	E-mail this article
	Add to my bookshelf
	Add to citation manager
	E-mail Alert
	RSS
	Articles by authors
	ZHENG Peng
	CHEN Zengyan
	TANG Zhichen
	RUAN Yujiao
	WANG Ruoyu
	ZHAO Yan
	LIU Tundong

Cite this article:

ZHENG Peng,CHEN Zengyan,TANG Zhichen, et al. Research on Compensation for Rotary Axis Rotation Error in Single Sensor-based Wafer Calibrator[J]. Acta Metrologica Sinica, 2024, 45(12): 1762-1771.

URL:

http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2024.12.03 OR http://jlxb.china-csm.org:81/Jwk_jlxb/EN/Y2024/V45/I12/1762

[2]	KIM H. Wafer Center Alignment System of Transfer Robot Based on Reduced Number of Sensors [J]. Sensors, 2022, 22(21): 8521.
[8]	乔凌霄, 陈江宁, 陈文会, 等. 一种基于多步法的高精密主轴回转误差分离算法 [J]. 计量学报, 2018, 39(1): 6-11.
[7]	王智, 董惠敏, 王德伦. 回转精度测评的运动几何学原理与不变量方法 [J]. 机械工程学报, 2020, 56(4): 11-24.
[9]	杨赫然, 赵桐, 孙兴伟, 等. 基于改进遗传算法的机床主轴径向回转误差分离技术研究 [J]. 仪器仪表学报, 2021, 42(1): 82-91.
[13]	马平, 李健洪, 欧建国, 等. 主轴回转精度多步误差分离研究 [J]. 机械科学与技术, 2018, 37(6): 884-890.
[12]	王少蘅. 高速高精密主轴回转误差在线动态测试技术研究[D].广州: 广东工业大学, 2006.
[1]	ZHU J L, LIU J M, XU T L, et al. Optical Wafer Defect Inspection at the 10nm Technology Node and Beyond [J]. International Journal of Extreme Manufacturing, 2022, 4(3): 032001.
[3]	XU J Y, HU H, LEI Y L, et al. A Wafer Pre-alignment Algorithm Based on Fourier Transform and Least Square Regression [J]. IEEE Transactions on Automation Science and Engineering, 2017, 14(4): 1771-1777.
	WANG Z, DONG H M, WANG D L. Kinematic Geometry Principles and Invariants Method for Rotational Accuracy Measurements and Evaluations [J]. Journal of Mechanical Engineering, 2020, 56(4): 11-24.
	QIAO L X, CHEN J N, CHEN W H, et al. An Algorithm of High Precision Spindle Rotation Error Separation Based on Multi-Step Method [J]. Acta Metrologica Sinica, 2018, 39(1): 6-11.
	YANG H R, ZHAO T, SUN X W, et al. Research on Radial Rotation Error Separation Technology of Machine Spindle Based on the Improved Genetic Algorithm [J]. Chinese Journal of Scientific Instrument, 2021, 42(1): 82-91.
[14]	罗勇. 高速主轴动态回转精度分析及试验研究[D].南京: 南京航空航天大学, 2020.
[4]	LI W, LI Z P, REN Y H, et al. Error Analysis of High-speed Precision Micro-Spindle Equipped with Micro-tool in Mechanical Micro-grinding [J]. Advanced Manufacturing Technology, 2018, 97: 599-609.
	NING Y H, YI G X, XI B Q, et al. The influence of assembly inclination error in hemispherical resonator on frequency splitting [J]. Journal of Chinese Inertial Technology, 2021, 29(4): 510-515.
[10]	LEE D H, LEE W R. Easy Measuring Instrument for Analyzing the Radial and Tilt Error Motions of a Rotating Shaft [J]. Proceedings of the Institution of Mechanical Engineers Part M Journal of Engineering for the Maritime Environment, 2017, 231(2): 667-674.
[16]	CASTANO F A, HERNNDEZ A M, SOTO-ROMERO G. Assessment of Artifacts Reduction and Denoising Tech-niques in Electrocardiographic Signals Using Ensemble Average-Based Method [J]. Computer Methods and Programs in Biomedicine, 2019, 182: 105034.
[18]	KONG G, ZONG Z J, YANG J Z, et al. Roundness Error Separation Based on Singularity Detection and Exact-Stop of Spindle in On-Machine Measurement of Spindle Rotation Error [J]. Mechanical Systems and Signal Processing, 2022, 171: 108647.
[5]	宁友欢, 伊国兴, 奚伯齐, 等. 半球谐振子装配倾角误差对频率裂解的影响分析 [J]. 中国惯性技术学报, 2021, 29(4): 510-515.
[6]	ZHA C Q, LI T B, ZHAO Y, et al. Influence of Microscale Effect on the Radial Rotation Error of Aerostatic Spindle [J]. Proceedings of the Institution of Mechanical Engineers, Part J: Journal of Engineering Tribology. 2020;234(7): 1131-1142.
[11]	LIU F, LIANG L, XU G H, et al, Four-Point Method in the Measurement and Separation of Spindle Rotation Error [J]. IEEE Transactions on Mechatronics, 2021, 26(1): 113-123.
	MA P, LI J H, OU J G, et al. Study on Multi-step Error Separation of Spindle Rotation Precision [J]. Mechanical Science and Technology for Aerospace Engineering, 2018, 37(6): 884-890.
[15]	ZHANG S H. Research on the Roundness Error Separation Method for Precision Spindle Based on Harmonic Wavelet De-noise and Mathematical Statistics Method [J]. IOP Conference Series: Materials Science and Engineering, 2019, 688(3): 033073.
[17]	GUO Y H, ZHOU X D, LI J, et al. A Novel and Optimized Sine-Cosine Transform Wavelet Threshold Denoising Method Based on the sym4 Basis Function and Adaptive Threshold Related to Noise Intensity [J]. Applied. Sciences, 2023, 13(19): 10789.