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| Study on Electrostatic Self-Calibration Method of Piezoelectric Accelerometer |
| CHEN Le |
| Unit 60 of 92493 Troops,Huludao,Liaoning 125000,China |
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Abstract In order to solve the problems of accelerometer difficulty in achieving regular calibration, high calibration cost,and difficulty in meeting long-term work needs, the self-calibration method of piezoelectric accelerometer with drive port is studied. The principle of self-calibration method simulating external vibration excitation and the conversion sensitivity laboratory measurement method of the internal drive piezoelectric element of the sensor are explained, and based on the inverse piezoelectric effect of the driving piezoelectric element, the on-site in-situ calibration of the accelerometer can be realized by the electrical excitation of the sensor drive port,and the calibration results of the shaker calibration method are compared. The experimental results show that in the frequency range 5~10000Hz, the self-calibration sensitivity results are consistent with the vibration table sensitivity calibration results,and the error is within±2%,which verifies the effectiveness of the method.
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Received: 29 September 2022
Published: 22 January 2024
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2024, Vol. 45 
