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| Traceability and Measurement Method for On-wafer Capacitance Test System |
| DING Chen,QIAO Yu-e,LIU Yan,ZHAI Yu-wei,WU Ai-hua |
| The 13th Research Institute of China Electronics Technology Group Corporation, Shijiazhuang, Hebei 050051,China |
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Abstract A traceability and measurement method was proposed in order to solve the problem that the capacitance parameter of on-wafer traceability and inaccurate measurement. The measurement results were connected with the four-terminal par capacitor standard by the on chip straight line to realize the traceability. Adopting the quantitative research of interference loop, corrected the influence of the probe system and cable, and accurated measurement of on wafer capacitance. The measurement accuracy of the metering levels test system improved 0.08% by this method.
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Received: 14 June 2022
Published: 17 November 2023
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2023, Vol. 44 
