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| Inverse Hartmann Surface Form Measurement System Based on Spherical Coordinates |
| MA Jian-rong, HAO Qun, ZHU Qiu-dong, HU Yao |
| School of Optoelectronics, Beijing Institute of Technology, Beijing 100081, China |
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Abstract A new method named inverse Hartmann surface form measurement based on spherical coordinates is presented. The method reduces the measured ray slope efficiently, increases the measurement dynamic range and spatial resolution simultaneously. A large asphericity surface with diameter 340mm is tested by the new method. The simulation result shows its accuracy of form error can be assured within λ/10, and is better than that in rectangular coordinates. It can be applied in on-line optic product evaluation rapidly and accurately with low cost.
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［1］ Seiferta L, Prussb C, Drbandc B, et al. Measuring Aspheres with a chromatic Fizeau Interferometer［C］//Proc SPIE, Munich, Germany, Optical Measurement Systems for Industrial Inspection VI, 2009, 7389: 19-1-19-9.
［2］ Wyant C. Interferometric testing of aspheric surface［J］, SPIE, 1987, 816:19-39.
［3］ 吴继宗, 戴晓芳,采振祥. 应用干涉型计算机全息图检测非球面［J］. 计量学报, 1987, 8(4):271-277.
［4］ 邬敏贤, Malacara D, Moore D T. 利用计算全息图作为位相补偿板的改进型刀口法［J］. 计量学报, 1991, 12(2):92-95.
［5］ Burke J, Bothe T, Osten W, et al. Reverse engineering by fringe projection［J］. Proc SPIE, 2002, 4778:312-324.
［6］ Perard D, Beyerer J. Three-dimensional measurement of specular free-form surfaces with a structured-lighting reflection technique［J］. Proc SPIE, 1997, 3204:74-80.
［7］ Hartmann J. Objektivuntersuchungen［J］. Zt. Instrumentenkd, 1904, 24:97.
［8］ Korovyakovskii Y P. Use of the Hartmann method for testing the surface of the 6-meter LAT mirror under shop conditions［J］. Soviet Journal of Optical Technology, 1977, 44(11):649-651.
［9］ Snezhko L I. On the accuracy of the Hartmann method for testing aspherical wavefronts［J］. Soviet Journal of Optical Technology, 1980, 47(9):505-508.
［10］ Lane R G, Tallon M. Wave-front reconstruction using a Shack-Hartmann sensor［J］, Applied Optics, 1992, 31(32):6902-6907.
［11］ 刘丹,闫岩,任冰强,赵永凯,等. 扫描型哈特曼检测装置研究［J］.强激光与粒子束, 2005, 17(9):1377-1381.
［12］ Malacara D. Optical shop testing［M］. 3rd Ed. New York: Wiley, 2007.
［13］ Xie F, Hao Q, Zhu Q D, et al. A Best-fit Sphere Definition Capable of Reducing Dynamic Range in Aspheric Surface Testing ［C］// Photonics Asia 2010 International Conference, Beijing: 2010, 7849,17-1-17-6.
［14］ 谢枫,郝群,朱秋东.基于斜率非球面度的非球面最接近比较球面定义［J］.光学学报,2010,30(11): 3197-3202.
［15］ 朱秋东, 郝群. 激光束偏转法非球面面形测量和计算［J］. 光学技术, 2002,28(1): 22-27. ［16］ Noll R J. Zernike polynomials and atmospheric turbulence［J］. Opt Soc, 1977, 67(8):1065-1072. |
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2013, Vol. 34 
