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| Investigation on Calibration Method of NTC Thermistor Thermometer Applied to Integrated Circuit Research on Calibration Method of NTC Thermistor Thermometer Used in Integrated Circuit |
| LI Jia-hao1,SUN Jian-ping1,LI Ting1,WANG Hong-jun1,WANG Guang-yao1,CHEN Ze-chuan2,GAO Chuan-ji2 |
1. National Institute of Metrology, Beijing 100029, China
2. College of Metrology and Measurement Engineering, China Jiliang University, Hangzhou, Zhejiang 310018, China |
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Abstract Aiming at the requirement of near mK temperature measurement accuracy of intgrated circuit (IC) in the range of 21～23℃, the influence of the calibration method of negtive temperature coefficient (NTC) thermistor thermometer on the temperature measurement accuracy of IC is studied. The coefficients of the Basic, Hoge-1, and Steinhart-Hart equations are calculated using the least-squares method, and the interpolation residuals of the calibration eqution are analyzed to evaluate the feasibility of the low-order accurate calibration equation for high-quality temperature measurement and control of IC fabrication processes. The results show that the standard deviations of the residuals of the Basic equation, Steinhart-Hart equation, and Hoge-1 equation are 2.29mK, 0.63mK, and 0.65mK, respectively; the Basic exponential eqution with two calibration points has the worst performance, and the Hoge-1 equation with three calibration points shows the best interpolation performance, which is valuable for accurate temperature measurement in narrow temperature regions of IC.
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Received: 18 November 2022
Published: 22 August 2023
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Corresponding Authors:
Jianping Sun
E-mail: sunjp@nim.ac.cn
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2023, Vol. 44 
