Abstract Based on the principle of fluid flow throttling, a high-precision optical fiber flow sensor was developed, with orifice plate as throttling device and two optical fiber Fabry-Perot pressure sensors as differential pressure signal measuring devices. The flow rate is measured by pressure differential across pressure transducers across the orifice plate In the mass flow measurement range of 0~100g/s, the linear equation of the flow rate and the square root of the pressure difference was obtained, and the linear fitting accuracy reached 0.99995. The developed optical fiber flow sensor has the advantages of high temperature resistance, electromagnetic interference resistance, compact size, passive sensor end and high measurement accuracy.
Wang Y, Cheng K, Tang J, et al. Analysis of the maximum flight Mach number of hydrocarbon-fueled scramjet engines under the flight cruising constraint and the combustor cooling requirement［J］. Aerospace Science and Technology, 2020,98:105594.
Wang A, Xu J, Cooper K L, et al. Miniature all-silica fiber optic pressure and acoustic sensors［J］. Optics letters, 2005, 30(24):3269-3271.
［13］
Hill G C, Melamud R, Declercq F E, et al. SU-8 MEMS Fabry-Perot pressure sensor［J］. Sensors & Actuators A Physical, 2007, 138(1):52-62.
［15］
王婷婷. 光纤法珀压力传感系统研究［D］. 北京:华北电力大学(北京), 2020.
Li L H, Zhu Y, Wang N, et al. Analysis and Experimental Study on Multi-channel Optical Fiber Fabry-Perot Demodulation System［J］. Acta Photonica Sinica, 2013, 42(9):1039-1045.
［18］
Jiang Y. Fourier transform white-light interferometry for the measurement of fiber-optic extrinsic Fabry-Perot interferometric sensors［J］. IEEE Photonics Technology Letters, 2008, 20(4):75-77.
Yao J, Zhang C Y. Development of the optic fiber flowmeter［J］. Journal of Transducer Technology, 2002, 21(3):1-4.
Gong J G, Dai Z Y, Deng S Q, et al. A Fiber Optical Flow Sensor with Difference Pressure for High Temperature［J］. Well Logging Technology, 2015,39(4):460-463.
Li H M, Gao H W, Liu B, et al. A Novel Fiber Bragg Grating Flowmeter［J］. Chinese Journal of sensors and actuators, 2006, 19(4):1195-1197.
Xie D L, Ge S, Hu P B, et al. Research and development of optical fiber active flow sensors［J］. Journal of China University of Metrology, 2015, 26(1):12-19.
［17］
Jiang Y. High-resolution interrogation technique for fiber optic extrinsic Fabry-Perot interferometric sensors by the peak-to-peak method［J］. Applied Optics, 2008, 47(7), 925-932.
［19］
Jiang Y. Fourier transform white-light interferometry for the measurement of fiber-optic extrinsic Fabry-Perot interferometric sensors［J］. IEEE Photonics Technology Letters, 2008, 20(4):75-77.
Ji G,Wu Y C. Current situation and development trend of flow meter［J］. Process Automation Instrumentation, 2020, 41(7):77-81.
Chen J L, Kong D M, Hao H, et al. A New Type of Optical Fiber Sensor for Multi-Phase Detection in Petroleum Production［J］. Acta Metrologica Sinica, 2022, 43(8): 1036-1043.
Liu X H, Liu S X, Shang Y, et al. Study of optical fiber fluid flow monitoring system using pipe vibration frequency characteristic［J］. Optical Instruments, 2015, 37(2):103-106.
［14］
Riza N A, Ghauri F Perez F. Silicon carbide-based remote wireless optical pressure sensor［J］. IEEE Photonics Technology Letters, 2007, 19(7):504-506.
2023, Vol. 44 
