Abstract Multiple images are acquired during the procedure of thermoreflectance microscopy, each pixel of the image should be bound to a fixed position of the object's surface throughout the procedure.Nevertheless, drifting of the object is inevitable, thus jeopardizing accuracy of the measurement.A sub-pixel image registration algorithm is put forward to estimate the drift, and the result is feed into a PID algorithm controlling a piezo nanopositioner to compensate for the position drift, so the real-time position drift correction is carried out.Experiments verify the performance of the algorithm and the effect of drift correction, the residual error of displacement correction is within 5nm, and errors introduced by position drift are well suppressed compared to uncompensated measurement, the test accuracy of thermoreflectance microscopy is improved.
LIU Yan,ZHAI Yu-wei,DING Chen, et al. Position Drift Compensation Method for Thermoreflectance Microscopy[J]. Acta Metrologica Sinica, 2022, 43(9): 1142-1146.
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2022, Vol. 43 
