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| An Enhanced SOLR Calibration Method |
| WU Ai-hua1,2,WANG Yi-bang1,HUO Ye1,LIANG Fa-guo1,LIU Chen1,LUAN Peng1,CHEN Xiao-hua1,WANG Hai2 |
1. The 13th Research Institute of China Electronics Technology Group Corporation, Shijiazhuang,Hebei 050051, China
2. Xidian University, Xi’an, Shaanxi 710071, China |
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Abstract An enhanced SOLR(eSOLR) calibration method for solving the 8-term errors model in an on-wafer test system is introduced. The proposed new method requires one undefined Thru, two pairs of undefined symmetrical Reflects (Open-Open and Short-Short) and a pair of known Loads. 8-term error terms are derived in detail. Calibration comparison method was carried out between commercial calibration methods and eSOLR. The result showed that eSOLR was more accuracy than SOLT and LRRM. The calibration method has been tested on a mismatched attenuator for the frequency range between 0.2GHz and 110GHz. Compared with the existing calibration methods, the new method shows the attenuator’s S11 is more consecutive and S21 more closer to the Multiline TRL.
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Received: 24 April 2022
Published: 20 August 2022
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2022, Vol. 43 
