新型箝位式压电电机的设计研究

doi:10.3969/j.issn.1000-1158.2022.08.16

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Abstract A novel clamped piezoelectric motor is proposed to solve the complex structure design problem of the clamped part of the square wave vibration when the traditional clamped piezoelectric motor works in the resonant state. Both the clamping part and the driving part of the motor are driven by a sinusoidal voltage of the same frequency to realize sinusoidal vibration. And the unidirectional output motion of the rotor is realized through the clamping contact between the stator and the rotor. Compared with the traditional clamping piezoelectric motor and the ultrasonic motor, the stator structure design does not need to adopt mode degeneration, which reduces the difficulty of the structure design. The structural parameters of stator and rotor are determined by finite element simulation, and the prototype is manufactured and the experimental platform is built. The clamping part is stimulated by sine wave and square wave respectively, and the waveform comparison of the driving part shows that the sine wave can also achieve the expected effect.The experimental results show that under quasi-static state, when the excitation voltage frequency is 250Hz and the voltage peak value Vp-p is 10V, the step distance is 0.5μm, the stepping speed is 0.13mm/s; under resonant state, when the excitation voltage frequency is 540Hz and the voltage peak value Vp-p is 70 V, the step distance is 32μm,the stepping speed is 16.9mm/s; the motor can achieve cross scale operation by taking into account low-frequency high-resolution and high-frequency high-speed output.

Key words： metrology piezoelectric motor trans-scale drive clamping mechanism sine wave drive

Received: 29 March 2022 Published: 20 August 2022

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TB971

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	Articles by authors
	YUE Zhi-han
	PAN Qiao-sheng
	TAO Sheng-zhi
	SHANG Jing-yi
	LI Xiao-jie

Cite this article:

YUE Zhi-han,PAN Qiao-sheng,TAO Sheng-zhi, et al. Research of a Novel Piezoelectric Drive MotorUsing the Clamping Mechanism[J]. Acta Metrologica Sinica, 2022, 43(8): 1077-1082.

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http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2022.08.16 OR http://jlxb.china-csm.org:81/Jwk_jlxb/EN/Y2022/V43/I8/1077

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