Acta Metrologica Sinica  2022, Vol. 43 Issue (7): 934-939    DOI: 10.3969/j.issn.1000-1158.2022.07.15
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Research on Traceability Method of Micro Capacitance Measuring Instrument at 500fF/1MHz
QIAO Yu-e1,LIU Xia-mei1,JIN Pan2,DING Chen1,REN Yu-long1,WU Ai-hua1,XU Yan-jun1
1. The 13th Research Institute of  China Electronics Technology Group Corporation, Shijiazhuang, Hebei 050051,
China
2. Chengdu Kaipu Electronic Technology Co., Ltd, Chengdu, Sichuan 610041, China
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Abstract  Micro capacitance measuring instrument in fF level has an important role in Military electronic products.In order to solve the no traceability problem of micro capacitance measuring instrument at 500fF/1MHz, a high frequency 500fF standard capacitor encapsulated with inert gas was manufactured as transfer standard.A measurement model of micro capacitance with high frequency was established, and the distributed parameter was estimated using “subjunctive” method.In the end, the uncertainty of a traceability method called “theoretical deduction” achieves 0.15%.Using three micro capacitance measuring instruments in the same level, the uncertainty of a traceability method called “measurement comparison” achieves 0.07%.The two kinds of traceability methods were used to calculate the same instrument, and the test results showed the same effect, which can satisfy users requirements.The above two traceability methods give an effective way for micro capacitance measurement in high frequency with lower capacitance.
Key wordsmetrology      micro capacitance      transfer standard      high frequency standard capacitor      subjunctive method      measurement comparison     
Received: 27 October 2020      Published: 18 July 2022
PACS:  TB971  
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QIAO Yu-e
LIU Xia-mei
JIN Pan
DING Chen
REN Yu-long
WU Ai-hua
XU Yan-jun
Cite this article:   
QIAO Yu-e,LIU Xia-mei,JIN Pan, et al. Research on Traceability Method of Micro Capacitance Measuring Instrument at 500fF/1MHz[J]. Acta Metrologica Sinica, 2022, 43(7): 934-939.
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http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2022.07.15     OR     http://jlxb.china-csm.org:81/Jwk_jlxb/EN/Y2022/V43/I7/934
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