Abstract The metastable krypton atoms have high internal energy, and they will be de-excited to produce electrons when they collide with the metal surface. The electron lens is used to image and detect the de-excited electrons to realize the characterization of the intensity and spatial distribution of the metastable krypton atom beam. Based on this principle, a metastable krypton atom beam imaging system is designed, and the finite element analysis method is used to study the influence of electrode spacing, thickness and electric potential on the movement of the de-excited electron beam. The results show that the imaging dispersion decreases with the improvement of the focusing ability of the electronic lens. The imaging error of each object point of the metastable krypton beam is below 2mm, the imaging size is 16.5mm, the average error is 3.71%, and the maximum error is 9.38%.
ZHANG Jia-le,FENG Gao-ping,SONG Jun-ling, et al. Design and Optimization of Metastable Krypton Beam Diagnostic System in Structure[J]. Acta Metrologica Sinica, 2022, 43(5): 682-687.
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2022, Vol. 43 
