Acta Metrologica Sinica  2022, Vol. 43 Issue (1): 97-101    DOI: 10.3969/j.issn.1000-1158.2022.01.15
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Research for on-Wafer LRRM Calibration Algorithm
HUO Ye, LIANG Fa-guo, WU Ai-hua, WANG Yi-bang, LUAN Peng, LIU Chen, SUN Jing
The 13th Research Institute of China Electronics Technology Group Corporation, Shijiazhuang, Hebei 050051, China
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Abstract  The LRRM calibration algorithm is researched, the measurement model of load standard is improved, the measured result is translated from the middle of the DUT to the probe tip by reference surface translation, and the calibration software is compiled based on MATLAB. The on-wafer scattering parameter measurement system is calibrated by the researched calibration method and commercial calibration method, and the same short calibration standard and attenuator are measured. The results show that at the frequency of 110MHz~110GHz, the maximum deviation of reflection magnitude is 0.02, and the maximum deviation of reflection phase is 0.3 degree, the maximum deviation of the transmission magnitude is 0.05dB, and the maximum deviation of transmission phase is 0.5 degree, which can meet the demand of on-wafer scattering parameter calibration and measurement.
Key wordsmetrology      on-wafer scattering parameters      LRRM calibration algorithm      measurement model      calibration software     
Received: 11 August 2020      Published: 06 January 2022
PACS:  TB973  
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HUO Ye
LIANG Fa-guo
WU Ai-hua
WANG Yi-bang
LUAN Peng
LIU Chen
SUN Jing
Cite this article:   
HUO Ye,LIANG Fa-guo,WU Ai-hua, et al. Research for on-Wafer LRRM Calibration Algorithm[J]. Acta Metrologica Sinica, 2022, 43(1): 97-101.
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http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2022.01.15     OR     http://jlxb.china-csm.org:81/Jwk_jlxb/EN/Y2022/V43/I1/97
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