1. School of Instrument Science and Optoelectronics Engineering, Hefei University of Technology, Hefei, Anhui230009, China
2. Anhui Province Key Laboratory of Measuring Theory and Precision Instrument,Hefei University of Technology, Hefei, Anhui 230009, China
Abstract Linear guide pairs are widely used in precision machine tools and instruments, and their kinematic accuracy directly affects the spatial positioning accuracy of the equipment in which they are located. Aiming at the earlier-developed transceiver split-type four-degree-of-freedom laser measurement system that can measure the straightness, pitch and yaw angle of the guide rail, but there is a problem of coupling interference between the straightness and angle measurement results, an error modeling and compensation method is proposed. The principle and structure of the laser measurement system are introduced, the main sources of the coupling error are determined and analyzed, and the compensation model of the coupling error is established by using the method of matrix optics and flush coordinate transformation. The results show that the straightness and angle measurement errors are reduced by more than 75% after the compensation using the proposed model. The proposed error modeling and compensation method not only helps to improve the accuracy of the four-degree-of-freedom laser measurement system, but also helps to reduce its cost.
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2021, Vol. 42 
