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| Research Progress on Broadband Electromagnetic Angular Vibration Calibration System |
| TANG Bo1,2,HE Wen1,LIU Ai-dong3 |
1. Zhejiang Province Key Laboratory of Advanced Manufacturing Technology,Zhejiang University,Hangzhou,Zhejiang 310027,China
2. College of Metrology and Measurement Engineering,China Jiliang University,
Hangzhou,Zhejiang 310018,China
3. National Institute of Metrology,Beijing 100029,China |
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Abstract On the basis of analyzing laser interferometry, the system composition, principle of measurement, data processing and measurement range for the angular vibration measurement method of A-type and B-type laser interferometry are described systematically, and it is especially pointed out that the performance of angular vibrators directly affects the angular vibration calibration result. On this basis, the research status and progress of angular vibrators are analyzed at home and abroad, and the specifications, application scopes and limitations of different types are pointed out. Finally, the electromechanical coupling equation of broadband angular vibrators is established, and the key techniques involved, such as design technology of a moving component with high torsional resonant frequency, design technology of a magnetic circuit structure with strong and uniform air gap magnetic field and design technology of an adjustable electro-viscoelastic-support device, are analyzed in depth, and the corresponding research ideas and suggestions are given.
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Received: 09 January 2020
Published: 18 October 2021
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2021, Vol. 42 
