Abstract A laser interferometer of nanometer displacement calibration system has been constructed based on high stability plane mirror interferometer (HSPMI).The layout of the calibration system is described.The data acquisition software based on VME bus has been designed for digital signal processing.Errors of the calibration system have been analyzed and the measurement accuracy is 293 nm.The results of the stability test and the nanometer displacement measurement of the calibration system demonstrate that the calibration system is effective and practical
LI Qing-xian,GAO Si-tian,LI Wei, et al. A Construction of Laser Interferometer of Nanometer Displacement Calibration System Based on HSPMI and Its Experiment Research[J]. Acta Metrologica Sinica, 2013, 34(6): 519-523.
［1］Smith A R, Gwo S, Shih C K. A new high-resolution two-dimensional micropositioning device for scanning probe microcopy applications ［J］. Review of Scientific Instruments,1994, 65(10):3 216-3 219.
［2］Garratt J D, Bottomley S C. Technology transfer in the development of a nanotopographic instrument ［J］. Nanotechnology, 1990, 1(4): 38-43.
［3］Yeh H C, Ni W T, Pan S. Digital closed-loop nanopositioning using rectilinear flexure stage and laser interferometry ［J］. Control Engineering Practice, 2005, 13(5): 559-566.
［4］王建林,胡小唐.纳米定位技术研究现状［J］.机械设计与研究,2000, 16(1):43-44.
［5］赵克功,高思田,徐毅.计量型原子力显微镜［J］.计量学报,1998, 19(1):1-7.
［6］李伟,高思田,卢明臻,施玉书,杜华.计量型原子力显微镜的位移测量系统［J］.光学精密工程, 2012, 20(4):796-802.
［7］王世华,陈秀玲,徐淦.利用三光束激光干涉仪评估纳米平台的移动性能［J］.光学精密工程,2011, 19(9): 2284-2291.
［8］Haitjema H, Schellekens P H J, Wetzels S F C L. Calibration of displacement sensors up to 300 μm with nanometer accuracy and direct traceablity to a primary standard of length ［J］. Metrologia, 2000, 37(1): 25-33.
［9］程维明,葛轶君. 精密定位中的激光干涉测量误差分析［J］.上海工程技术大学学报. 2006, 20(4): 287-289.
［10］Edlen B. The Refractive Index of Air ［J］. Metrologia,1966, 2(2):71-80.
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