基于光谱共焦的在线集成表面粗糙度测量方法

doi:10.3969/j.issn.1000-1158.2021.06.10

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Abstract A method of on-line integration roughness measurement based on chromatic spectrum confocal is put forward for achieving the measurement of microcosmic profile synchronization with the dimensional and distortion tolerance,and improving the efficiency of machining and testing.The non-contact measurement ability is established by constructing the measuring system and integration the abilities of system communication control and Gaussian profile filtering on LabVIEW.The measurement results of the step height standards and roughness standard sample show that the system has a good measuring accuracy and repeatability.The measuring repeatability of the parameter Ra is 0.0026μm.It has a certain application prospect in optimizing measurement process and improving measuring efficiency.

Key words： metrology surface roughness chromatic confocal measurement control on-line Integration profile filter

Received: 17 February 2020 Published: 23 June 2021

PACS:

TB92

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	Articles by authors
	ZHOU Yong
	LI Jian-jun
	ZHAO Tian-ming
	WANG Zhen-hong
	TANG Sheng-jiang

Cite this article:

ZHOU Yong,LI Jian-jun,ZHAO Tian-ming, et al. A Method of On-line Integration Roughness Measurement Based on Chromatic Spectrum Confocal[J]. Acta Metrologica Sinica, 2021, 42(6): 753-758.

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http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2021.06.10 OR http://jlxb.china-csm.org:81/Jwk_jlxb/EN/Y2021/V42/I6/753

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