110GHz在片16项误差模型校准件定值方法研究

doi:10.3969/j.issn.1000-1158.2021.03.17

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Abstract The conventional lumped parameter circuit model has been widely used in the definition of calibration kits for on-wafer probing. However, the accuracy of the defined model parameter is not great, due to the non-ideal circuit model and fitting algorithm used in extracting circuit parameters. A more accurate definition method is presented for 16-term calibration kits that is designed to correct the crosstalk at high frequencies. The new definition method is based on measurements of fabricated assistant multiline TRL calibration kits and full-wave simulations. The measurement system corrected by such defined 16-term calibration kits was compared with two-tier calibration method of Multiline TRL proposed by NIST. The results shows excellent agreement between these two techniques, i.e. the difference in transmission magnitude is within 0.30dB and the phase is within 1.0°. The proposed definition method offers appealing advantages over the NIST technique, in terms of smaller number of standards required and fewer movements of probes.

Key words： metrology on-wafer test 16-term error model definition for calibration kits multiline TRL crosstalk

Received: 19 November 2019 Published: 23 March 2021

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TB973

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	Articles by authors
	WANG Yi-bang
	ZHOU Rui
	CHEN Ting
	WU Ai-hua
	LIU Chen
	LIANG Fa-guo

Cite this article:

WANG Yi-bang,ZHOU Rui,CHEN Ting, et al. Investigation into Definition Method for On-wafer 16-term Error Model Calibration Kits Below 110GHz[J]. Acta Metrologica Sinica, 2021, 42(3): 365-369.

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http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2021.03.17 OR http://jlxb.china-csm.org:81/Jwk_jlxb/EN/Y2021/V42/I3/365

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