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Review of Michelson Laser Interferometer for Micro Displacement Measurement |
WANG Dong1,CUI Jian-jun2,ZHANG Fu-min1,MIN Shuai-bo3,CHEN Kai2 |
1.School of Precision Instruments and Optoelectronics Engineering,Tianjin University,Tianjin 300072,China
2.National Institute of Metrology, Beijing 100029, China
3.Zhejiang Sci-Tech University, Nanometer Measurement Lab, Hangzhou, Zhejiang 310018, China |
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Abstract Michelson interferometry can achieve nanometer or even higher resolution, and can be directly traced to laser wavelength and many other advantages. It is an important technical measure of micro displacement measurement at present. Aiming at various laser interferometric techniques based on Michelson interferometer principle are classified and introduced. The interferometric measurement techniques to achieve sub-nanometer accuracy and resolution in micro-displacement measurement are mainly discussed. Finally, the development trend of laser micro displacement measurement is prosected in future.
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Received: 21 August 2019
Published: 19 January 2021
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