基于改进Sierra 抖动算法的微离焦投影三维轮廓测量技术研究

doi:10.3969/j.issn.1000-1158.2020.06.07

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Abstract The traditional frequency modulation of the phase profile measurement techniqueis is analyzed. Combining with the micro-defocusing projection, the improved Sierra dithering algorithm is proposed using these quentially scanning to reduce binarization of sinusoidal grating quantization error and inhibition of asymmetric texture, this method can greatly improve the sinusoidality of the defocused fringe the pattern. The defocus grating is generated using the improved algorithm for three-dimension alprofile measurement technology, comparing with the Bayer ordered dithering algorithm, the Sierra dithering algorithm and the Floyd-steinberg error diffusion dithering algorithm, the experimental results show that the improved Sierra dithering algorithm has better adaptability, it can greatly reduce the phase error and faster calculation speed, accurate generated grating, and phase quality have then improved greatly, it is suitable for high precision three-dimensional profile measurement technology.

Key words： metrology three-dimension alprofile measurement improved Sierra dithering algorithm micro-defocusing projector error diffusion

Received: 22 August 2018 Published: 08 June 2020

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TB92

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	Articles by authors
	WEI Xiao-hua
	XU Wen-jun
	XU Xue-ya

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WEI Xiao-hua,XU Wen-jun,XU Xue-ya. Study on Improved Sierra Dithering Algorithm for Micro-defocusing Projector Three-dimensional Profile Measurement Technology[J]. Acta Metrologica Sinica, 2020, 41(6): 669-675.

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http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2020.06.07 OR http://jlxb.china-csm.org:81/Jwk_jlxb/EN/Y2020/V41/I6/669

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