一种薄膜材料电阻率测试用环形电极设计

doi:10.3969/j.issn.1000-1158.2020.03.15

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Abstract To study resistivity test of high resistivity thin film materials for spacecraft, based on the simulation analysis of the existing design method of ring electrode for high-resistance resistivity test, combined with the mathematical model derivation, a methed of design value for a ring electrode effective test width and size was proposed, and a ring electrode device for spacecraft thin film material measurement was desighed. Through the experiment, the surface resistivity and volume resistivity of the film material for spacecraft were measured, and the margin of indication error was controlled within 9%.It can be applied to the resistivity test of composite material for spacecraft with a volume resistivity of 105~1018Ω·cm.

Key words： metrology resistivity test film material ring electrode

PACS:

TB971

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	Articles by authors
	GUO Bei-chen
	CHEN Shao-hua
	WANG Shu-qiang
	CAI Jian-zhen
	SUN Chao
	WANG Wei

Cite this article:

GUO Bei-chen,CHEN Shao-hua,WANG Shu-qiang, et al. Ring Electrode Design for Resistivity Test of Thin Film Materials[J]. Acta Metrologica Sinica, 2020, 41(3): 349-353.

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http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2020.03.15 OR http://jlxb.china-csm.org:81/Jwk_jlxb/EN/Y2020/V41/I3/349

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