Acta Metrologica Sinica  2019, Vol. 40 Issue (6): 941-945    DOI: 10.3969/j.issn.1000-1158.2019.06.01
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Research in the structure design and sensing characteristics of the filament-surface capacitive sensor
ZENG Tao1,LU Yun-feng2,3,ZHANG Zhong-hua2,3,CHEN Le1,XU Su-an1
1. College of Mechanical and Electrical Engineering, China Jiliang University, Hangzhou, Zhejiang 310018, China
2. National Institute of Metrology, Beijing 100029, China
3. The Key Laboratory for the Electrical Quantum Standard of State Administration for Market Regulation, Beijing 100029,  China
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Abstract  A filament-surface capacitive sensor based on self-damping vertical reference to measure the residual horizontal displacement precisely during the vertical movement is presented. The filament electrode works as a direct vertical reference, which avoids the system error caused by indirect-reference conversion. And the liquid damper in the end of the filament electrode ensures the stability of the capacitive sensor. Experiments show that in the range of 0.38~0.4pF, the resolution of the filament-surface capacitive sensor is better than 0.05μm, and the short-term stability is approximately 0.1μm.
Key wordsmetrology      filament-surface capacitive sensor      sensing characteristics      measurement for the movement direction      vertical direction reference     
Received: 17 September 2018      Published: 10 October 2019
PACS:  TB971  
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ZENG Tao
LU Yun-feng
ZHANG Zhong-hua
CHEN Le
XU Su-an
Cite this article:   
ZENG Tao,LU Yun-feng,ZHANG Zhong-hua, et al. Research in the structure design and sensing characteristics of the filament-surface capacitive sensor[J]. Acta Metrologica Sinica, 2019, 40(6): 941-945.
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http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2019.06.01     OR     http://jlxb.china-csm.org:81/Jwk_jlxb/EN/Y2019/V40/I6/941
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