平面度计量——点线面之间的量值传递与控制

doi:10.3969/j.issn.1000-1158.2019.02.03

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Abstract Two transmission pathways of line and plane in flatness metrology were studied. Based on the absolute test of measuring points, a unified method for solving different flatness index systems on straight lines and plane domains was put forward. Aiming at the problem that the original definition of flatness cannot be maintained in circular optical flat witch tested by an equal thickness interferometer, and fringe spacings (N、ΔN) had to used in this scene. The influence on transfer accuracy of hypothesis and additional requirements in 《JJG 28—2000 Optical Flat》 which used for defining line with points and defining surface with lines was analyzed. Characteristic orthogonal sections which contain maximum change were proposed to replace the random orthogonal sections in 《JJG 28—2000 Optical Flat》. Based on the advantages of high resolution and rapid measurement of phase shifting interferometer, the method to search for the characteristic orthogonal sections was described. So, it can promote the rigorous of flatness in metrology.

Key words： metrology flatness value transfer phase-shifting interferometer characteristic section

Received: 01 August 2017 Published: 07 March 2019

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TB92

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	WANG Qing
	GU Yang

Cite this article:

WANG Qing,GU Yang. Flatness Metrology—Value Transfer and Control of Point,Section and Surface[J]. Acta Metrologica Sinica, 2019, 40(2): 189-195.

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http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2019.02.03 OR http://jlxb.china-csm.org:81/Jwk_jlxb/EN/Y2019/V40/I2/189

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