高精度微孔测量探头

doi:10.3969/j.issn.1000-1158.2018.05.02

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Abstract The research and development of high-precision probes are described. A micro-hole measuring probe composed of a two-dimensional angle sensor, an elastic mechanism, and a homemade micro-spherical tungsten stylus is introduced. The stiffness and repeatability of the probe were verified by simulation and experiments respectively. The results show that the stiffness of the probe in three-dimensional directions is less than 0.4 mN/μm, the repeatability is better than 20 nm (k = 2). Finally, a practical measurement for a micro-hole with a diameter of approximately 420 μm was performed using the probe. The measurement results verified the practicality of the probe.

Key words： metrology probe micro-hole stiffness repeatbility

Received: 13 November 2017 Published: 05 September 2018

PACS:

TB92

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	Articles by authors
	LI Rui-jun
	XU Peng
	TANG Shuai-tao
	FAN Kuang-chao
	CHENG Zhen-ying

Cite this article:

LI Rui-jun,XU Peng,TANG Shuai-tao, et al. High-precision Probe for Measuring Micro-holes[J]. Acta Metrologica Sinica, 2018, 39(5): 598-604.

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http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2018.05.02 OR http://jlxb.china-csm.org:81/Jwk_jlxb/EN/Y2018/V39/I5/598

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