Design of Angular Accelerometer Based on Resonant Optical Tunneling Effect
LI Hui-ming1,2,ZOU Lu1,2,JIAN Ao-qun1,2,WANG Lei-yang1,2,DUAN Qian-qian1,SANG Sheng-bo1
1. Micro-nano System Research Center, Taiyuan University of Technology, Taiyuan, Shanxi 030024, China
2. Key Laboratory of Advanced Transducers and Intelligent Control System, Shanxi Province and Ministry of Education, Taiyuan, Shanxi 030024, China)
Abstract Resonant optical tunneling effect (ROTE) is used to describe a design method of angular acceleration sensor and its sensing characteristics are analyzed. Finally, through theoretical analysis and simulation calculation using Mathematica based on the resonant optical tunneling effect,the quality factor and sensitivityof the accelerometer reach up to 1.96×108 and 0.1 °/nm, respectively, which is higher than that of the classic F-P cavity.
LI Hui-ming,ZOU Lu,JIAN Ao-qun, et al. Design of Angular Accelerometer Based on Resonant Optical Tunneling Effect[J]. Acta Metrologica Sinica, 2018, 39(5): 684-687.
［1］赵浩, 冯浩. 一种电磁感应式角加速度传感器及误差分析［J］. 计量学报, 2012, 33(6):536-540.
［2］Sieberling S, Chu Q P, Mulder J A. Robust Flight Control Using Incremental Nonlinear Dynamic Inversion and Angular Acceleration Prediction［J］. Journal of Guidance Control & Dynamics, 2010, 33(6):1732-1742.
［3］于梅, 刘爱东, 何闻,等. 衍射光栅外差激光干涉法角振动校准技术研究［J］. 计量学报, 2015, 36(6):561-564.
［4］Llobera A, Seidemann V, Plaza J A, et al. Integrated polymer optical accelerometer［J］. Photonics Technology Letters IEEE, 2005, 17(6):1262-1264.
［5］He J L, Yang S. Line shapes in a plasmonic waveguide system based on plasmon-induced transparency and its application in nanosensor［J］. Optics Communications, 2016, 381:163-168.
［6］于梅, 孙桥. 外差式激光干涉仪应用于正弦直线和旋转振动测量技术的研究［J］. 计量学报, 2005, 26(3):237-241.
［7］Jian A Q, Zang X M. Resonant Optical Tunneling Effect: Recent Progress in Modeling and Applications［J］. IEEE Journal of Selected Topics in Quantum Electronics, 2013, 19(3): Article ID 9000310.
［8］Zhu W M, Zhang X M, Liu A Q, et al. A micromachined optical double well for thermo-optic switching via resonant tunneling effect［J］. Applied Physics Letters, 2008, 92(25):251101. doi: 10.1063/1.2951621.
2018, Vol. 39 
