采用HRTEM对石墨烯材料单层厚度测量的研究

doi:10.3969/j.issn.1000-1158.2017.02.04

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Abstract The cross-sectional sample is made with the film of graphene material and is observed by high-resolution transmission electron microscopy (HRTEM). When the temperature is 20 ℃ , the value of the thickness of single-layer of graphene material measured by the software of HRTEM is 0.411 nm, otherwise, the cross-sectional of each layer of graphene material is not straight. The data of the edge of each layers could be obtained by the method of local shearing and increasing the gap, the value of thickness of the layer is 0.390 nm which is calculated by the histogram method, and the value of the uncertainty of the thickness is 0.042 nm. When the confidence level is 95%, the value of the thickness of single-layer graphene material is (0.390±0.086) nm. Compared with the nominal thickness of graphene,the calculated value of the thickness of single-layer graphene material is bigger. The difference of the thickness values is reasonable because there are gaps between the layers of grapheme material.nm. Compared with the nominal value of the graphene thickness，the single-layer thickness of grapheme-like was bigger. The different of the thickness values was thought to the gaps between the layer and the layer of grapheme-like.

Key words： metrology graphene materials single-layer thickness nano-height HRTEM uncertainty

Received: 10 March 2016 Published: 28 February 2017

PACS:

TB921

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	Articles by authors
	WANG Chen-ying
	JING Wei-xuan
	JIANG Zhuang-de
	LIN Qi-jing
	HAN Feng
	LI Lei

Cite this article:

WANG Chen-ying,JING Wei-xuan,JIANG Zhuang-de, et al. The Measurement of Single-layer Thickness of Graphene Materials by High Resolution Transmission Electron Microscopy[J]. Acta Metrologica Sinica, 2017, 38(2): 145-148.

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http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2017.02.04 OR http://jlxb.china-csm.org:81/Jwk_jlxb/EN/Y2017/V38/I2/145

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