基于叉指结构的片上小电容标准单元研究

doi:10.3969/j.issn.1000-1158.2025.01.03

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Abstract The interdigital capacitance is theoretically calculated using the Schwarz-Christoffel transform method. Through a combination of theoretical calculations and simulation analysis， the study investigates the influence of the geometric size of the interdigital capacitor structure and the number of electrodes on the on-chip small capacitance standard cell. The preparation and test verification of interdigital capacitor standard units with capacitance values ranging from 10 fF to 100 fF have been realized. Test results indicate that the on-chip small capacitance standard cells become more linearly dependent on the changes in capacitance as the length and number of interdigitated electrodes increase. In the range of 10 fF to 100 fF， the standard uncertainty of an on-chip small capacitance standard cell is better than 0.5% × C + 100 aF （where C is the capacitance）. It provides a research basis for the further production of a wider range of on-chip small capacitance standard cells.

Key words： electromagnetic metrology femto Farad on-chip capacitance standard cell interdigital structure Schwarz-Christoffel transformation

Received: 23 May 2024 Published: 14 January 2025

PACS:

TB97

Fund:National Natural Science Foundation of China

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	Articles by authors
	ZHAO Shuo
	RAN Zixuan
	CHEN Jian
	YANG Yan

Cite this article:

ZHAO Shuo,RAN Zixuan,CHEN Jian, et al. Research on On-chip Small Capacitance Standard Cell Based on Interdigital Structure[J]. Acta Metrologica Sinica, 2025, 46(1): 14-18.

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http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2025.01.03 OR http://jlxb.china-csm.org:81/Jwk_jlxb/EN/Y2025/V46/I1/14

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