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| Fabrication and Quality Evaluation of 2～10μm Step Height Reference Material Candidates |
| LIU Di1,3,WANG Chenying2,3,ZHANG Yaxin1,3,WANG Yunxiang4,WANG Song1,3,CHEN Luntao1,3,WANG Yonglu3,ZHU Nan3,JIANG Zhuangde1,3 |
1. School of Mechanical Engineering, Xi′an Jiaotong University, Xi′an, Shaanxi 710049, China
2. School of Instrument Science and Technology, Xi′an Jiaotong University, Xi′an, Shaanxi 710049, China
3. State Key Laboratory for Manufacturing Systems Engineering, Xi′an Jiaotong University,Xi′an, Shaanxi 710049, China
4. Suzhou Institute of Metrology, Suzhou, Jiangsu 215128, China |
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Abstract The micrometer step height reference materials can used to calibrate the z-axis performance of the instrument and transmit accurate micrometer height values. The step height reference material candidates with 2,5,10μm nominal size are prepared by photolithography combined with dry etching. The height, roughness, and parallelism of the steps are characterized. Using a laser confocal microscope and an aspheric measuring instrument for measurement, the step height is evaluated based on the bilateral algorithm, histogram method, International Organization for Standardization (ISO algorithm, and the decoupling criterion for optical microscopy (LEL) method. For the same reference material candidates, the standard deviation between each evaluation method does not exceed 0.024μm. Moreover, the relative deviation of the step height evaluation values is within 5%. This indicates that the evaluation results obtained using different algorithms and instruments have a high level of consistency and reliable measurement values. The comparison of evaluation results from different instruments indicates that the evaluation methods also have good consistency. Meanwhile, the roughness does not exceed 0.04μm. The parallelism of the upper and lower surfaces does not exceed 0.03°, which verifies the good preparation effect of the reference material candidates.
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Received: 19 September 2023
Published: 25 March 2024
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2024, Vol. 45 
