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| Fabrication and Test of High Quality Factor MgF2 Crystal Microcavity |
| QU Zhi-er1,2,PAN Yi-jie1,LIU Xian-wen2,ZHANG Cheng1,2,WANG Jin1,QU Ji-feng1 |
1. Center for Advanced Measurement Science, National Institute of Metrology, Beijing 100029, China;
2. School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, China |
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Abstract Based on a linear motor, a high precision scale and a mechanical feedback unit, a precision automatic grinding and polishing system was developed. The system enabled accurately control the size, thickness and shape of the crystal microcavities during preparation. The trapezoidal micro-disk cavity of magnesium fluoride crystal with high quality factor was fabricated by preforming, rough grinding, rough polishing and fine polishing. The surface roughness of magnesium fluoride crystal after precision polishing was characterized to be 2.84nm using a white light interferometer. By setting up a taper fiber and crystal microcavity coupling testing system, the quality factor of the prepared crystal microcavity was measured to be 4.55×108 at 1550nm by the optical cavity ring-down method.
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Received: 03 January 2023
Published: 22 August 2023
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2023, Vol. 44 
