1. College of Metrology and Measurement Engineering, China Jiliang University, Hangzhou, Zhejiang 30018, China
2. School of Instrument Science and Engineering, Harbin Institute of Technology, Harbin, Heilongjiang 150001, China
3. Center for Advanced Measurement Science, National Institute of Metrology, Beijing 100029, China
4. School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, China
5. College of Optical and Electronic Technology, China Jiliang University, Hangzhou, Zhejiang 310018, China
Abstract The photonic temperature sensing based on silicon microcavity with whispering gallery mode can be applied in extreme environments such as strong electromagnetic field, high irradiation and strong vibration. On the basis of silicon microcavity photonic temperature sensor with mK resolution which is pre-designed, fabricated and validated, a miniaturized microcavity photonic temperature measurement hardware system was developed, which includes modules of signal generation, high-speed digital-to-analog conversion, voltage-to-current conversion, laser diode temperature control, weak signal acquisition and amplification were designed and implemented, as well as the algorithm of synchronous measurement and spectral temperature measurement based on single chip microcomputer. The system performance was verified in a high stable constant temperature bath, the extended uncertainty of the actual temperature measurement results is 115mK (k=2), and the temperature range is 30K.
MEI Ming-cheng,HAN Qi-na,SHI Yang, et al. A Miniaturized Silicon Microcavity Based Photonic Temperature Measurement System[J]. Acta Metrologica Sinica, 2023, 44(7): 1052-1058.
Yang L, Zhuang Y Y, Liu Y, et al. Research progress of whispering gallery mode optical resonators ［J］. College Physics, 2021, 40(5): 41-54.
［4］
Kim G D, Lee H S, Park C H, et al. Silicon photonic temperature sensor employing a ring resonator manufactured using a standard CMOS process ［J］. Optics Express, 2010, 18(21): 22215-22221.
［9］
Klimov N N, Ahmed Z. Fabrication and Testing of Photonic Thermometers ［J］. Journal of Visualized Experiments, 2018(140): e55807.
Klimov N, Berger M, Ahmed Z. Towards reproducible ring resonator based temperature sensors ［J］. Sensors & Transducers, 2015, 191(8): 63-66.
［7］
Klimov N N, Berger M, Ahmed Z. Characterization of ring resonator structures for applications in photonic thermometry ［C］//Optical Sensors. Boston, USA, 2015.
［11］
Ahmed Z, Cumberland L T, Klimov N N, et al. Assessing radiation hardness of silicon photonic sensors ［J］. Scientific reports, 2018, 8(1): 1-7.
Xiong Y T,Kang G G,Zhang C,et al. High Resolution and Practical Photonic Thermometer by Side-coupled One-dimensional Photonic Crystal Microcavity［J］. Acta Metrologica Sinica, 2022, 43(9): 1109-1114.
［16］
Zhang C, Kang G G, Xiong Y T, et al. Photonic thermometer with a sub-millikelvin resolution and broad temperature range by waveguide-microring Fano resonance ［J］. Optics Express, 2020, 28(9): 12599-12608.
［18］
Xu X Y, Jiang X F, Zhao G M, et al. Phone-sized whispering-gallery microresonator sensing system ［J］. Optics Express, 2016, 24(23): 25905-25910.
Han Q N, Zhou K L, Qu J F, et al. Design and Performance Evaluation of Amplifiers for Noise Thermometers ［J］. Acta Metrologica Sinica, 2020, 41(10): 1234-1239.
［22］
Komma J, Schwarz C, Hofmann G, et al. Thermo-optic coefficient of silicon at 1550 nm and cryogenic temperatures ［J］. Applied Physics Letters, 2012, 101(4): 041905.
［6］
Ahmed Z, Strouse G. Transitioning from resistance devices to photonic devices for temperature measurements ［C］//International Conference on Intelligent Sensors. Singapore, Singapore, 2014.
［8］
Xu H, Hafezi M, Fan J, et al. Ultra-sensitive chip-based photonic temperature sensor using ring resonator structures ［J］. Optics Express, 2014, 22(3): 3098-3104.
［10］
Klimov N N, Mittal S, Berger M, et al. On-chip silicon waveguide Bragg grating photonic temperature sensor ［J］. Optics letters, 2015, 40(17): 3934-3936.
［12］
Eisermann R, Krenek S, Winzer G, et al. Photonic contact thermometry using silicon ring resonators and tuneable laser-based spectroscopy ［J］. Technisches Messen: Sensoren, Gerate, Systeme, 2021, 88(10): 640-654.
［13］
Dedyulin S, Todd A, Janz S, et al. Packaging and precision testing of fiber-Bragg-grating and silicon ring-resonator thermometers: current status and challenges ［J］. Measurement Science and Technology, 2020, 31(7): 074002.
［15］
Wang J, Pan Y J, Gao J X, et al. An On-Chip Silicon Photonics Thermometer with Milli-Kelvin Resolution ［J］. Applied Sciences, 2022, 12(8): 3713.
［17］
Zhang C, Kang G G, Wang J, et al. Photonic thermometer by silicon nitride microring resonator with milli-kelvin self-heating effect ［J］. Measurement, 2022, 188: 110494.
［19］
Xu X Y, Chen W J, Zhao G M, et al. Wireless whispering-gallery-mode sensor for thermal sensing and aerial mapping ［J］. Light: science & applications, 2018, 7(1): 1-6.
Zhang Z R, Huang L, Gao S T, et al. Nanoparticle size measurement by multi-angle dynamic light scattering method based on FPGA high-speed signal acquisition ［J］. Acta Metrologica Sinica, 2021, 42(4): 438-444.
2023, Vol. 44 
