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| A Miniaturized Silicon Microcavity Based Photonic Temperature Measurement System |
| MEI Ming-cheng1,3,HAN Qi-na2,3,SHI Yang3,ZHOU Kun-li3,ZENG Jiu-sun1,WANG Jin3,ZHANG Cheng3,4,GAO Jian-xin3,5,QU Zhi-er3,4,PAN Yi-jie3,QU Ji-feng3 |
1. College of Metrology and Measurement Engineering, China Jiliang University, Hangzhou, Zhejiang 30018, China
2. School of Instrument Science and Engineering, Harbin Institute of Technology, Harbin, Heilongjiang 150001, China
3. Center for Advanced Measurement Science, National Institute of Metrology, Beijing 100029, China
4. School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, China
5. College of Optical and Electronic Technology, China Jiliang University, Hangzhou, Zhejiang 310018, China |
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Abstract The photonic temperature sensing based on silicon microcavity with whispering gallery mode can be applied in extreme environments such as strong electromagnetic field, high irradiation and strong vibration. On the basis of silicon microcavity photonic temperature sensor with mK resolution which is pre-designed, fabricated and validated, a miniaturized microcavity photonic temperature measurement hardware system was developed, which includes modules of signal generation, high-speed digital-to-analog conversion, voltage-to-current conversion, laser diode temperature control, weak signal acquisition and amplification were designed and implemented, as well as the algorithm of synchronous measurement and spectral temperature measurement based on single chip microcomputer. The system performance was verified in a high stable constant temperature bath, the extended uncertainty of the actual temperature measurement results is 115mK (k=2), and the temperature range is 30K.
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Received: 20 October 2022
Published: 17 July 2023
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2023, Vol. 44 
