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Traceability and Measurement Method for On-wafer Capacitance Test System |
DING Chen,QIAO Yu-e,LIU Yan,ZHAI Yu-wei,WU Ai-hua |
The 13th Research Institute of China Electronics Technology Group Corporation, Shijiazhuang, Hebei 050051,China |
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Abstract A traceability and measurement method was proposed in order to solve the problem that the capacitance parameter of on-wafer traceability and inaccurate measurement. The measurement results were connected with the four-terminal par capacitor standard by the on chip straight line to realize the traceability. Adopting the quantitative research of interference loop, corrected the influence of the probe system and cable, and accurated measurement of on wafer capacitance. The measurement accuracy of the metering levels test system improved 0.08% by this method.
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Received: 14 June 2022
Published: 17 November 2023
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[4] |
乔玉娥, 梁法国, 丁晨, 等. 片上皮法级电容测试系统专用标准件的研制[J]. 半导体技术, 2019 (3): 232-238.
|
[3] |
丁晨, 乔玉娥, 丁立强, 等. MEMS在片测试系统整体校准技术探讨[C]//2015 国防计量与测试学术交流会. 2015: 33-37.
|
[9] |
刘岩, 乔玉娥, 丁晨, 等. 10 GΩ在片高值电阻溯源实验[J]. 计量学报, 2018, 39(4): 545-548.
|
[15] |
霍晔, 吴爱华, 王一帮, 等. 在片校准件参数定值方法[J]. 计量学报, 2022, 43(8): 979-983.
|
|
Ding C, Qiao Y E, Liu Y. Research on Capacitance Parameter Technology Of MEMS On-wafer Test System[J]. China Metrology, 2016(12): 94-96.
|
[7] |
Quirk M, Serda J. 半导体制造技术[M]. 韩郑生,等译. 北京: 电子工业出版社, 2015.
|
[13] |
颜晓军, 扈蓓蓓, 李亚琭, 等. 一种新型的交流阻抗计量标准装置 [J]. 计量学报, 2020, 41(5): 602-607.
|
[12] |
栾鹏, 王一帮, 梁法国, 等. 共面波导传输线电容准确测量及不确定度分析 [J]. 计量学报, 2018, 39(2): 272-275.
|
|
Qiao Y E, Liang F G, Ding C, et al. Development of Capacitance Standards for On-Chip pF-Capacitance Test System[J]. Semiconductor Technology, 2019(3): 232-238.
|
[11] |
邱桂苹, 于晓洋, 陈德运. 微小电容测量电路[J]. 黑龙江电力, 2006, 28(5): 362-366
|
|
Ding C, Qiao Y, Ding L Q, et al. Discuss the whole calibration technology of MEMS on-wafer test system[C]//2015 National defense measurement and testing Academic Exchange Conference. 2015: 33-37.
|
|
Qu H, Peng B, Peng P, et al. Effect of Stray Capacitance on Capacitance Detecting System of Capacitive Microaccelerometer[J]. Instrument Technique and Sensor, 2018 (6): 15-18.
|
[10] |
王一帮, 吴爱华, 刘晨, 等. 一种对在片测量系统中串扰误差进行修正的新型校准方法[J]. 计量学报, 2021, 42(12): 1553-1558.
|
[1] |
丁晨, 乔玉娥, 刘岩. MEMS在片测量系统电容参数校准技术研究[J]. 中国计量, 2016(12): 94-96.
|
[2] |
丁晨, 乔玉娥, 刘岩, 等. 用于在片测试系统整体校准的电阻标准件[J]. 中国测试, 2019, 45(7): 97-101.
|
[6] |
Cascade Microtech. Impedance Standard Substrate Map[EB/OL]. [2017], https: //www. formfactor. com
|
[8] |
Rambo C, Sieber H. Novel Synthetic Route to Biomorphic Al2O3 Ceramics[J]. Cheminform, 2010, 36(26) : 1088-1091.
|
|
Luan P, Wang Y B, Liang F G, et al . Coplanar Waveguide Transmission Line Capacitance Measurement and Uncertainty Analysis [J]. Acta Metrologica Sinica , 2018, 39(2): 272-275.
|
|
Yan X J , Hu B B, Li Y L, et al . A New Type of AC Impedance Measurement Standard Device[J]. Acta Metrologica Sinica, 2020, 41(5): 602-607.
|
|
Huo Y , Wu A H, Wang Y B, et al. Method for Definition Parameters of On-Wafer Calibration Standards [J]. Acta Metrologica Sinica, 2022, 43(8): 979-983.
|
[5] |
曲昊, 彭倍, 彭鹏, 等. 寄生电容对电容式加速度传感器输出电压的影响[J]. 仪表技术与传感器, 2018 (6): 15-18.
|
|
Qiu G P, Yu X Y, Chen D Y. Mico-capacitance measuring circuit [J]. Heilongjiang Electric Power, 2006, 28(5): 362-366
|
|
Ding C, Qiao Y E, Liu Y, et al. Resistance standard parts for calibration of on-wafer test system[J]. China Measurement & Test, 2019, 45(7): 97-101.
|
|
Liu Y, Qiao Y E, Ding C, et al. Traceability Experiment on 10 GΩ On-wafer High Resistance[J]. Acta Metrologica Sinica, 2018, 39(4): 545-548.
|
|
Wang Y B, Wu A H, Liu C, et al. A Novel Calibration Method at On-Wafer Measurement System Affected by Leakage [J]. Acta Metrologica Sinica , 2021, 42(12): 1553-1558.
|
[14] |
Kopanski J J, Afridi M Y, Jiang C, et al. Test chip to evaluate measurement methods for small capacitances[C]//Proceedings of IEEE International Conference on Microelectronic Test Structure. Oxnard, CA, USA, 2009: 39-42.
|
|
|
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