1. College of Metrology and Measurement Engineering, China Jiliang University, Hangzhou, Zhejiang 310018, China
2.Zhejiang Institute of Metrology, Hangzhou, Zhejiang 310018, China
3.Key Laboratory of Acoustics and Vibration Precision Meas Tech for State Market Regulation, Hangzhou, Zhejiang 310018, China
4. Key Laboratory of Acoustics and Vibration Precision Meas Tech of Zhejiang Province, Hangzhou, Zhejiang 310018, China
Abstract The radiated sound field of the high intensity focused ultrasonic transducer is measured based on the laser vibration measurement method. Compared with the results measured by the standard hydrophone, the measured values of the fundamental wave signal, the second harmonic and the third harmonic at the focus are basically consistent. The error of the fundamental wave sound pressure is within 10%, and the sound pressure distribution at the focal plane is basically consistent. At the same time, the influence of the thin film on the sound field measurement in the laser vibration measurement method is solved based on the multilayer dielectric impedance transfer method, and the sound pressure transmission coefficient of the thin film at different frequencies is calculated. Experiments are designed to verify the results obtained by the laser vibrometry method and the standard hydrophone measurement method at different frequencies(1MHz、5MHz、10MHz). The results show that the correction of the measurement results of the laser vibrometer method by the sound pressure transmission coefficient can effectively reduce the measurement error.
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2023, Vol. 44 
