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| Study on Software Control of Atomic Force Microscope Measurement Based on Tuning Fork |
| LIU Lin-wei1,2,GAO Si-tian2,HUANG Lu2,WANG Xue-ying1,ZHU Min-hao1,2,SUN Xiao-shuang2 |
1. College of Metrology and Measurement Engineering, China Jiliang University, Hangzhou, Zhejiang 310018, China
2. National Institute of Metrology, Beijing 100029, China |
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Abstract Based on the principle of the tuning fork atomic force microscope (AFM), a measuring control system in amplitude modulation mode was designed to satisfy the needs of experiment. The main function of the measuring control system was to approach the surface, maintain the position of the tip and measure the surface topography of the sample. The curves under different excitation voltages were obtained. The working range of the tip under 100mV, 200mV, 500mV and 1V excitation voltages was 4.7nm, 8.5nm, 12.1nm and 15.7nm, and the sensitivity was 0.0423V/nm, 0.0564V/nm, 0.0861V/nm and 0.0831V/nm. Using the control system to keep the working point position unchanged as far as possible, the positions curve of change was obtained. The positive deviation was 2.3nm, and the negative deviation was 1.3nm. The surface topography was measured by X-axis bidirectional scanning mode, that is, the surfaces information was measured in each round-trip process along the X-axis direction, the forward scanning and the reversed scanning data were calculated and processed respectively. The spacing error was 5.2nm and the height error was 0.3nm during the forward scanning, while the spacing error was 6.4nm and the height error was 0.5nm during the reversed scanning.
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Received: 20 June 2022
Published: 13 January 2023
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2023, Vol. 44 
