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Research on Precision Measurement Technology of Terahertz Wavelength Based on Interferometry |
WU Jia-lu1,FANG Bo1,3,LI Jian-min2,WANG Zhen3,GAO Yan-jiao1,CAI Jin-hui1 |
1. College of Metrology and Measurement Engineering, China Jiliang University, Hangzhou, Zhejiang 310018, China
2. North Electro-Optics Group Co. Ltd, Xi'an, Shaanxi 710000, China
3. Hangzhou Dahua Apparatus Manufacture Co.Ltd, Hangzhou, Zhejiang 311400, China |
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Abstract A split-optical wavelength measurement system based on Michelson interferometry and introducing a reference laser as a measure of optical path change is built. Theoretical analysis and software simulation are used to study the influencing factors in the measurement optical path. The relative additional optical path difference caused by the deflection of the moving mirror, the deflection of the beam splitter and the deflection of the beam is used as the evaluation standard for analysis and judgment. The measurement results show that the wavelength of the 100GHz terahertz source is 3.1142mm, and the relative extended uncertainty is 0.9%(k=2). A standard terahertz frequency meter is used to conduct a comparison experiment on the same terahertz source, and the correction coefficient is 1.0035, which verified the accuracy of the measurement results and the reliability of the terahertz wavelength measurement system.
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Received: 06 July 2021
Published: 19 September 2022
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