表面粗糙度国际比对自动测量系统关键技术研究

doi:10.3969/j.issn.1000-1158.2022.07.02

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Abstract Based on the surface roughness measurement device of NIM, researches on the visual positioning system, automatic operating system and multi-degree-of-freedom displacement system have been carried out, so as to realize the automatic measurement in accordance with the procedures specified in the international comparison agreement.Through experimental verification, the system can effectively realize the automatic measurement of surface roughness and meet the requirements of international comparison.In the measurement experiment on the surface roughness standard specified by the international comparison, the repeatability of the automatic positioning measurement of the system is 4.2nm, which is 2.6 times higher than the manual positioning measurement, and can effectively reduce the introduction of human error in the measurement process.

Key words： metrology surface roughness international comparison automatic measurement visual positioning;measurement repeatability

Received: 10 March 2021 Published: 18 July 2022

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TB92

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	Articles by authors
	BU Xiang-peng
	ZHANG Shu
	PI Lei
	SHI Yu-shu

Cite this article:

BU Xiang-peng,ZHANG Shu,PI Lei, et al. Research on the Key Technology of the Automatic Measurement System for Surface Roughness International Comparison[J]. Acta Metrologica Sinica, 2022, 43(7): 844-850.

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http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2022.07.02 OR http://jlxb.china-csm.org:81/Jwk_jlxb/EN/Y2022/V43/I7/844

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