用于芯片电容精确测量的在片开路方法研究

doi:10.3969/j.issn.1000-1158.2022.05.15

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Abstract To achieve the effective open operation during the chip capacitance measurement, and enhance the veracity and coherence of the results, the on-wafer open method was researched. By analyzing the principle and structure of the standard capacitor and open termination, combined with the actual needs of semiconductor technical measurement, the on-wafer open instrument was designed and manufactured. Based on constructing the on-wafer capacitance test system, measurements on 1pF chip capacitance were conducted using traditional hanging open method and on-wafer open method. Results show that, compared with hanging open method, the on-wafer open method improves the veracity and coherence of test data, while the measuring repeatability achieves 0.01%, which offers an effective open method for chip capacitance metrology and measurement.

Key words： metrology on-wafer capacitance measurement open instrument standard capacitance chip measurement

Received: 03 July 2020 Published: 18 May 2022

PACS:

TB971

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	Articles by authors
	LI Hao
	QIAO Yu-e
	DING Chen
	DING Li-qiang
	LIU Xia-mei
	WU Ai-hua

Cite this article:

LI Hao,QIAO Yu-e,DING Chen, et al. Research on On-wafer Open Method for Chip Capacitance Measurement[J]. Acta Metrologica Sinica, 2022, 43(5): 657-661.

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http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2022.05.15 OR http://jlxb.china-csm.org:81/Jwk_jlxb/EN/Y2022/V43/I5/657

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