在片LRRM校准算法研究

doi:10.3969/j.issn.1000-1158.2022.01.15

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Abstract The LRRM calibration algorithm is researched, the measurement model of load standard is improved, the measured result is translated from the middle of the DUT to the probe tip by reference surface translation, and the calibration software is compiled based on MATLAB. The on-wafer scattering parameter measurement system is calibrated by the researched calibration method and commercial calibration method, and the same short calibration standard and attenuator are measured. The results show that at the frequency of 110MHz~110GHz, the maximum deviation of reflection magnitude is 0.02, and the maximum deviation of reflection phase is 0.3 degree, the maximum deviation of the transmission magnitude is 0.05dB, and the maximum deviation of transmission phase is 0.5 degree, which can meet the demand of on-wafer scattering parameter calibration and measurement.

Key words： metrology on-wafer scattering parameters LRRM calibration algorithm measurement model calibration software

Received: 11 August 2020 Published: 06 January 2022

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TB973

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	Articles by authors
	HUO Ye
	LIANG Fa-guo
	WU Ai-hua
	WANG Yi-bang
	LUAN Peng
	LIU Chen
	SUN Jing

Cite this article:

HUO Ye,LIANG Fa-guo,WU Ai-hua, et al. Research for on-Wafer LRRM Calibration Algorithm[J]. Acta Metrologica Sinica, 2022, 43(1): 97-101.

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http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2022.01.15 OR http://jlxb.china-csm.org:81/Jwk_jlxb/EN/Y2022/V43/I1/97

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