Abstract Three-dimensional finite element model of array sensor of electrical capacitance tomography is established based on COMSOL software and the solution of forward problem of ECT is completed.Dimensionless parameter optimization of array electrode with three-layer distribution of ECT is carried out.Firstly, the influence of the screen radius R3, electrode height h, electrode width w and layer spacing l on the sensitivity uniformity index P and the dynamic range D of the capacitance value is analyzed.After that, using orthogonal experiment design, the effect of each structural parameters is integrated and balanced.At last, the optimal ECT three-dimensional sensor structural parameters are obtained as R3=1.50,h=0.20,w=0.20,l=0.06.
［1］张立峰. 压缩感知在电容层析成像中的应用［J］.北京航空航天大学学报, 2017, 43(11): 2316-2321.
Zhang L F. Compressed Sensing Application to Electrical Capacitance Tomography［J］.Journal of Beijing University of Aeronautics and Astronautics, 2017, 43(11): 2316-2321.
［2］Yang W Q, Peng L H. Image Reconstruction Algorithms for Electrical Capacitance Tomography［J］.Measurement Science & Technology, 2003, 14(1): R1-R13.
［3］刘靖, 孙猛, 刘石, 等. 电容层析成像技术测量煤粉输送浓度的研究［J］.计量学报, 2011, 32(1): 31-35.
Liu J, Sun M, Liu S, et al. Study on the Measurement of Pulverized-coal Concentration using Electrical Capacitance Tomography［J］.Acta Metrologica Sinica, 2011, 32(1): 31-35.
［4］马敏,范广永,王涛. 基于ECT的占空比可调双阵列传感器设计［J］.计量学报, 2019, 40(6): 1057-1163.
Ma M, Fan G Y, Wang T. Design of EGR Adjustable Dual Array Sensor Based on ECT［J］.Acta Metrologica Sinica, 2019, 40(6): 1057-1163.
［4］张立峰, 李佳, 田沛. Kalman滤波在ECT图像重建中的应用研究［J］.计量学报, 2017, 38(3): 315-318.
Zhang L F, Li J, Tian P. ECT Image Reconstruction Algorithm Based on Kalman Filtering［J］.Acta Metrologica Sinica, 2017, 38(3): 315-318.
［5］Sun B, Wang H, Wang P. An electrical capacitance tomography based on internal array electrodes［J］.Chinese Journal of Sensors & Actuators, 2013, 26(6): 820-824.
［6］Li N, Cao M C, He C F, et al.Multi-Parametric Indicator Design for ECT Sensor Optimization Used in Oil Transmission［J］.IEEE Sensor Journal, 2017, 17(7): 2074-2088.
［7］董向元, 郭淑青, 于海龙, 等. 带有径向电极的小尺度电容层析成像传感器设计［J］.中国电机工程学报, 2007, 27(23): 66-70.
Dong X Y, Guo S Q, Yu H L, et al. Design for Miniature Electrical Capacitance Tomography Sensor With Radial Screens［J］.Proceedings of the CSEE, 2007, 27(23): 66-70.
［8］张雪辉, 王化祥, 问雪宁. 电容层析成像系统三维电场分析及阵列电极优化［J］.天津大学学报, 2007, 40(9): 1041-1047.
Zhang X H, Wang H X, Wex X N. Three-Dimensional Electric Field Simulation and Electrode Array Optimization in Electrical Capacitance Tomography System［J］. Journal of Tianjin University, 2007, 40(9): 1041-1047.
［9］张立峰, 刘晶, 田沛. 一种电容层析成像系统电极组合激励测量方法［J］.计量学报, 2017, 38(4): 469-472.
Zhang L F, Liu J, Tian P.An Exciting-measuring Mode for Electrical Capacitance Tomography System［J］. Acta Metrologica Sinica, 2017, 38(4): 469-472.
［10］吴新杰, 胡晟, 付荣荣. 基于COMSOL的电容层析成像系统灵敏度场的计算［J］.辽宁大学学报(自然科学版), 2011, 38(3): 193-196.
Wu X J, Hu S, Fu R R. Calculation of Sensitivity Field of Electrical Capacitance Tomography System Based on COMSOL［J］. Journal of Liaoning University(Natural Science Edition), 2011, 38(3): 193-196.
［11］温丽梅,周苗苗,李明, 等. 改进的Tikhonov正则化图像重建算法［J］.计量学报, 2018, 39(5): 679-683.
Wen L M, Zhou M M, Li M, et al. Improved Tikhonov Regularization Method for Image Reconstruction［J］.Acta Metrologica Sinica, 2018, 39(5): 679-683.
［12］高岩, 李谋遵, 周昌乐. 电容层析成像系统传感器参数优化［J］.计算机工程与应用, 2007, 43(8): 225-229.
Gao Y, Li M Z, Zhou C L.Parameter Optimization Based on Orthogonal Test Design for Transducer in Electrical Capacitance Tomography System［J］.Computer Engineering and Applications, 2007, 43(8): 225-229.
［13］Ye Z, Banasiak R, Soleimani M.Planar Array 3D Electrical Capacitance Tomography［J］.Insight: Non-Destructive Testing and Condition Monitoring, 2013, 55(12): 675-680.
［14］Li Y, Holland D J. Optimizing the Geometry of Three-Dimensional Electrical Capacitance Tomography Sensors［J］.IEEE Sensors Journal, 2015, 15(3): 1567-1574.
［15］Hu Y H, Zhou Y G, Wang Y F. Three-dimensional Electrical Capacitance Tomography Reconstruction by the Landweber Iterative Algorithm with Fuzzy Thresholding［J］.Science Measurement & Technology IET, 2014, 8(6): 487-496.
2020, Vol. 41 
