基于比值线性化的高适应性光栅细分方法研究

doi:10.3969/j.issn.1000-1158.2020.07.03

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Abstract Electronic subdivision is the key technology to achieving the nanometer resolution for the grating displacement sensors.And the error is caused by the subdivision method and the grating signal quality.Aiming at the limitations of real-time signal correction method in small-step measurement and some complicated working conditions, based on signal amplitude ratiometric, a new electronic subdivision linearization method is proposed from the perspective of improving the adaptability of subdivision method to non-ideal grating signals.In this way, two kinds of real-time signal compensation algorithms are constructed to further improve the linearity of the signal.Then, the principle of the proposed method is described, the error under the input of non-ideal grating signal is analyzed.And a theoretical accuracy of up to 0.003 μm and an actual accuracy of 0.08 μm are achieved.The numerical simulation and comparison experiments show that the proposed method has better adaptability to the non-ideal grating signals than the commonly used arctangent algorithm and linearization method based on the difference between the absolute values of the sine and cosine signals.

Key words： metrology grating displacement sensors electronic subdivision ratiometric linearization high adaptability

Received: 14 January 2019 Published: 29 June 2020

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TB921

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	Articles by authors
	ZHAO Guo-bo
	YE Guo-yong
	SHI Yong-sheng
	YIN Lei
	LIU Hong-zhong

Cite this article:

ZHAO Guo-bo,YE Guo-yong,SHI Yong-sheng, et al. Research on Ratiometric Linearization Based High Adaptive Grating Signal Subdivision Method[J]. Acta Metrologica Sinica, 2020, 41(7): 781-788.

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http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2020.07.03 OR http://jlxb.china-csm.org:81/Jwk_jlxb/EN/Y2020/V41/I7/781

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