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| A research on correction method of nonlinear errors for homodyne laser interferometer |
| JIN Tao1,TANG Yi-kui1,LE Yan-fen1,LIU Fang-fang2,LEI Li-hua2 |
1. School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China
2. Shanghai Institute of Measurement and Testing technology, Shanghai 201203, China |
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Abstract A kind of Heydemann correction method by minimizing the geometric distance is proposed for elimination the nonlinear errors of a single frequency laser interferometer in the displacement measurement. The Jamin interferometer is used to make a verification experiment. Jamin interferometer is a homodyne interferometer which conducts a differential structure based on the plane mirror. The movement of measured object will make the interferometer output orthogonal signals shift with a phase difference of 90° which are both used for displacement correction of the Jamin interferometer and correction method proposed. The experiment results show that the goodness of fit of corrected displacement is similar with Jamin interferometers which nearly equals 1. Compared with the result of Jamin interferometer, the residual errors between the corrected displacement and the displacement of capacitive sensor are much smaller under the same driving condition of piezoelectric ceramics, correction accuracy is better than the result of Jamin interferometer.
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Received: 14 June 2019
Published: 08 June 2020
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2020, Vol. 41 
