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| Research on 110 GHz Traceable Multi-TRL Calibration Standard Based on On-wafer GaAs |
| YUAN Si-hao1,LIU Xin-meng1,HUANG Hui2 |
1.National Institute of Metrology, Beijing 100029, China
2.Xinchen Technologies Co. Ltd, Beijing 100013, China |
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Abstract To study the technique of on-wafer self-calibration, a GaAs-based Multi-TRL calibration standard kit on coplanar waveguideis is developed. It can be used for measurement system of on-wafer scattering parameters from 1 GHz to 110 GHz. The design of the calibration kitis is demonstrated and shows that good agreement with foreign commercial calibration kit and metrological calibration reference material.
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Received: 16 May 2018
Published: 01 September 2019
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2019, Vol. 40 
