一种可溯源原子力探针显微镜

doi:10.3969/j.issn.1000-1158.2019.02.02

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Abstract A traceable atomic force probe microscope based on white light interference is developed. A robust white light interference zero-order fringe postioning algorithm is presented and a high-resolution displacement measurement system is established. On basis of above work, a probe calibration method is proposed to realize traceable measurement for micro-nano surface. A standard grating (step height: (21.4±1.5) nm) is tested 10 times under the same conditions, the measurement average value is 21.56 nm and the standard deviation is 0.51 nm. And a three-dimensional characteristic sample (step height: 150 nm) is used for 3D measurement. The accuracy and stability of the developed instrument have been verified by the experiments.

Key words： metrology atomic force microscope probe calibration traceability white light interference

Received: 20 December 2017 Published: 07 March 2019

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TB92

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	Articles by authors
	YANG Wen-jun
	HU Chi
	LIU Xiao-jun

Cite this article:

YANG Wen-jun,HU Chi,LIU Xiao-jun. A Traceable Atomic Force Microscope[J]. Acta Metrologica Sinica, 2019, 40(2): 183-188.

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http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2019.02.02 OR http://jlxb.china-csm.org:81/Jwk_jlxb/EN/Y2019/V40/I2/183

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